µmach laser micro-machining systems
The mmach from RTM, in partnership with Quanta System, is a new series of ultra compact but fully specified industrial laser micro-machining systems, which can be equipped in a modular architecture on the basis of customer requests. Depending on the chosen wavelength and configuration, the mmach is capable of directly machining a wide range of micron scale features in a large range of materials, including metals, semiconductors, ceramics, diamond and hard materials, polymers and glasses.
Micromachining Features · High quality with minimal thermal damage · High process speed · High aspect ratio · High peak power for efficient vaporisation · Excellent taper angle control · Complex shapes · Micro-drilling, cutting and milling from a single system 80 µm hole in 1mm hardened steel Array of 5 µm diameter holes in 100 µm stainless steel
Micromachining Specifications · Thickness 0.1-1.5 mm · Hole diameter 5 - 500 µm · Kerf width £ 15 mm · Aspect ratio up to 50:1 · Taper up to 0° · Accuracy £ 3 µm Textile fibre extrusion die, arm width is 100 µm, 400 µm stainless steel

150 µm-with slots in 625 µm thick silicon 200 µm-width slots in 400 µm thick silicon carbide 3D structure in composite